Brooks SLA5851S 质量流量计

简要描述：Brooks SLA5851S 质量流量计关键应用：化学品与石化分析和试验过程；实验室和分析系统；生命科学实验室；薄膜气相沉积；热处理、切割等其他热过程；真空应用。

产品咨询联系我们

详情介绍

关键应用

17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

±0.6% of SP (20- FS)

±0.12% of FS (<20% FS)

1100 slpm up to 2500 slpm: ±0.6% of FS

Standard Devices (includes uncertainty from reference standards

±0.9% of SP (20- FS)

±0.18% of FS (2-20% FS)

1100 slpm up to 2500 slpm: ±1.0% of FS

模拟通讯

0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

数字通讯	DeviceNet™ EtherCAT® EtherNet/IP™ FOUNDATIONTM Fieldbus Profibus® PROFINET RS-485

留言询价